CLBO Crystal - An Overview
CLBO Crystal - An Overview
Blog Article
With this paper, The brand new lapping slurry and polishing slurry are launched. And the deliquescence degree of CLBO is fallen to cheapest. A different working technological know-how is usually adopted. Just after tough polishing, the focus of ultra-precision polishing slurry is greater adequately. So does the ultra-precision polishing speed, as well as the wiping speed is faster compared to deliquescence pace. The CLBO crystal floor roughness can attain 1nm and retain the surface high quality effectively. Access by your institution
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We summarized The existing advancement position on the substantial-electrical power DUV laser each for the wavelength of FHG from the one-μm laser and at 193 nm. The latest improvement from the good-condition/fiber laser, and also the nonlinear optical crystals, prompts not merely the average electrical power but in addition the beam quality (coherence) in the DUV lasers to an unprecedented level.
For example, The present concave OC could get replaced by a airplane mirror which could mitigate the ability density to the floor of M1 as well as diamond. What's more, working with higher problems threshold coatings for M1 and diamond would also improve the output electricity without any damages. Then, the NIR laser at the 2nd Stokes wavelength could possibly be higher sufficient, along with its excellent beam quality, to crank out the ultimate DUV laser at 193 nm which has a substantial typical electricity.
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Both equally the 1040 nm and 1078 nm laser originate from a person dual-wavelength Yb-doped fiber laser. Every single laser is amplified by stages of fiber amplifier and Yb-doped materials amplifier, respectively.
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The beam profile revealed in Figure 7b demonstrated a fantastic beam top quality as on the list of merits of Raman laser, which might be helpful to crank out a 193-nm DUV laser with a high quality beam.
The conversion effectiveness from basic NIR to DUV is from 5% to 36% in accordance with the claimed results in Table 1. Growing the conversion effectiveness will decrease the stress on the look and set up of the elemental laser amplifier along with the electrical electricity intake. A fantastic beam quality of the fundamental laser may also contribute for the rising on the conversion effectiveness and also the suitable electric power depth on the NIR and inexperienced CLBO Crystal laser while in the SHG and FHG approach, respectively. The very best conversion efficiencies from NIR to eco-friendly and eco-friendly to DUV laser by use of CLBO crystal are 70% and around fifty%, respectively [twelve], which corresponds on the conversion effectiveness of 35% from basic to DUV.
The event from the 193-nm laser was shown by phases of SFG. To be able to scale the DUV laser ability efficiently, a completely new principle from the 193-nm DUV laser technology is offered based on the diamond Raman laser.